Items where Division is "Research Centres > Advanced Materials and Surface Engineering" and Year is 2002
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Kelly, Peter, Bradley, J. W., Backer, H., Aranda-Gonzalvo, Y. and Arnell, R. D. (2002) The distribution of ion energies at the substrate in an asymmetric bi-polar pulsed DC magnetron discharge. Plasma sources science and technology, 11 (2). pp. 165-174. ISSN 1361-6595