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Surface topography and physicochemistry of silver containing titanium nitride nanocomposite coatings

Whitehead, Kathryn A., Kelly, Peter, Li, Heqing and Verran, Joanna (2010) Surface topography and physicochemistry of silver containing titanium nitride nanocomposite coatings. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 28 (1). 180 187. ISSN 1520-8567

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